Semes Develops Next-Generation Semiconductor KrF Spinner 'Omega Prime'

Equipment Monopolized by Japan with a 90% Market Share
Semes Is the Only Domestic Producer

Semiconductor equipment company 'Semes' announced on the 7th that it has developed a track equipment called 'Krypton Fluoride (KrF) Spinner' used in semiconductor photolithography processes and passed quality tests. The equipment is named 'Omega Prime.'

Sems developed the fluorine krypton (KrF) spinner 'Omega Prime'. Photo by Sems

A spinner is a device used in semiconductor manufacturing processes to evenly coat photoresist on a wafer, expose it to light in an exposure system, and then develop it. This equipment is currently monopolized by Japan, holding a market share of up to 90%. Among Korean companies, Semes is the only one producing it.

Exposure technologies for engraving circuits on semiconductors include Krypton Fluoride (KrF), Argon Fluoride (ArF), and Extreme Ultraviolet (EUV). Semes has been producing ArF immersion (ArF-i) equipment as well as KrF spinners. The newly developed equipment supports the WLPAD (Word Line Pad) process and has improved wafer processing capacity by more than 20% per hour, the company explained.

Jang Se-yeon, head of the photo team, said, "We expect significant import substitution effects from this development," adding, "We will lead technological leadership by introducing differentiated equipment focused on high added value in the future."