[Report] Samsung and Hynix Wafers Stacked Like Library Books... A Visit to Lam Research R&D Center

Semiconductor Equipment Company 'Lam Research' Establishes Yongin Campus
Cleanroom Experience Introduced to Strengthen Customer Collaboration

Giant Semiconductor Equipment Towering Over Human Height
Wafers Stacked Like Books on Shelves Draw Attention

American semiconductor equipment company Lam Research has chosen the Yongin semiconductor cluster to expand its domestic business. The company is creating a campus that includes a research and development (R&D) center, manufacturing plant, logistics center, and office facilities. Inside the R&D center’s cleanroom, which was the first facility to be established, a large number of wafers from its clients Samsung Electronics and SK Hynix were stacked on steel structures resembling bookshelves, drawing attention.

Exterior view of Lam Research Korea Technology Center (KTC) in Yongin, Gyeonggi-do / Photo by Lam Research Korea

On the 28th, Lam Research, an American semiconductor equipment company, unveiled its comprehensive 30,000㎡ R&D center called the 'Korea Technology Center (KTC)' located in Jagok-dong, Yongin, to the media. KTC is the first building established within the Yongin semiconductor cluster, which is being developed by both the government and private sectors. Lam Research introduced this facility last year to strengthen cooperation with domestic clients such as Samsung Electronics and SK Hynix.

During an afternoon visit to KTC, visitors were able to experience the cleanroom equipped with various semiconductor equipment. The cleanroom is a specialized space created for semiconductor production, characterized by its ability to block external contaminants such as dust, which is critical given the advanced nature of semiconductor products. To enter the cleanroom, visitors wore white dustproof suits with hoods, along with safety glasses and dustproof caps, undergoing thorough preparation.

Upon entering the cleanroom, which had high ceilings and white walls on all sides, the first thing noticed was the mechanical noise from various semiconductor equipment. Due to the operation of massive machines towering well above human height, microphones and earphones were necessary for internal communication. Lam Research explained that the cleanroom was designed to replicate the exact environment of their clients to conduct live demos and process development with them.

An employee inspecting equipment in the cleanroom at Lam Research KTC / Photo by Lam Research Korea

The KTC cleanroom housed six etching machines and six deposition machines, along with numerous metrology devices. These machines each played a role in the semiconductor chip production process on silicon wafers: applying specific materials in film form (deposition), removing unnecessary materials (etching), and inspecting for defects during production (metrology).

The most frequently used equipment was the 'Sense.i platform' for the etching process. Facing the Sense.i platform, one was struck by its size, towering over 2 meters tall. The equipment was vertically structured to minimize wasted space within the limited cleanroom area. Su-min Lee, an engineer at Lam Research who guided the cleanroom tour, explained, "There are dozens of sensors and cameras inside," adding, "It is a product that enhances wafer productivity."

Throughout the cleanroom, there were also white-walled structures. These were measures to restrict access to authorized personnel only when testing equipment under development with clients or when security was required during process development.

Construction site view of the office building to be built next to Lam Research KTC / Photo by Kim Pyeonghwa

In another area, cream-colored steel structures stretched several meters long, resembling library bookshelves, catching the eye. Inside these were multiple wafers stored in square transparent acrylic boxes. The engineer explained, "These are wafers provided by clients," and added, "We keep them here to inform clients of the test results after conducting tests."

By operating the cleanroom at KTC, Lam Research not only achieves rapid feedback with domestic clients but also resolves various security issues. The company plans to relocate its Technical Training Center, previously operated in Dongtan, Gyeonggi Province, and its Korean headquarters in Pangyo, to near KTC, establishing the Yongin campus to strengthen customer support. To this end, an office building is under construction with a target completion date of July next year.

Lee Sang-won, President of Lam Research Korea, stated, "Korea accounts for 75% of the DRAM market and 55% of the NAND flash market," adding, "With two major customers (Samsung Electronics and SK Hynix), we are making large-scale investments domestically." He further said, "Taking this opportunity to relocate to the Yongin campus, we will strengthen cooperation with Korean semiconductor partners and do our best."