[Asia Economy Reporter Jang Hyowon] Yesty, a semiconductor equipment specialist company, announced on the 2nd that it has filed a patent related to high-pressure annealing technology applied to core processes in semiconductor manufacturing. The patented technology pertains to the pressure chamber, a core component of high-pressure annealing equipment, and focuses on the localization of the deuterium reactor device for the first time.
As global semiconductor companies are making aggressive investments to expand ultra-fine processes, demand for high-pressure annealing technology, a core semiconductor manufacturing process, is expected to increase. Market interest in related technologies is also high, and in the IPO market, the corporate value of high-pressure annealing equipment companies is being highly evaluated.
The annealing process improves the reliability of semiconductors by replacing defects on the semiconductor Si (silicon oxide) surface with high-pressure hydrogen and deuterium, enhancing drive current and integrated circuit performance.
Yesty's high-pressure annealing equipment can perform the annealing process while maintaining 100% hydrogen concentration under 30 atmospheres of high pressure at a temperature of 800℃. This equipment enhances the penetration rate of deuterium at the semiconductor interface due to the high pressure, maximizing heat treatment. Existing annealing equipment requires high temperatures of 600~1100℃ and hydrogen concentrations below 5%, resulting in lower efficiency in improving semiconductor interface defects.
Recently, global semiconductor companies are expanding ultra-fine processes below 10nm to improve information processing speed and reduce costs. The company explained that demand for high-pressure annealing equipment is rapidly increasing as "improving semiconductor production yield" through high-pressure annealing processes emerges as a core competitive advantage.
A Yesty official stated, "Based on Yesty's semiconductor heat treatment technology and hydrogen control technology, we plan to newly enter the semiconductor annealing equipment market, which has excellent marketability and profitability, to secure future growth engines," adding, "We have already started developing high-pressure annealing equipment since May last year and have now filed the related patent."
He continued, "In the semiconductor business sector, while steadily expanding cash cow products such as furnaces and chillers, we will continuously discover various items to maximize profitability, starting with entering the high-pressure annealing equipment market," he emphasized.
Yesty manufactures semiconductor and display equipment based on heat treatment technology. It supplies semiconductor post-process equipment such as furnaces and chillers, as well as display lamination equipment, to major domestic and international semiconductor and display companies.
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