Samsung Electronics Applies EUV to DRAM for the First Time... Supplies 1 Million Modules

10nm-Class Process Miniaturization Technology and Mass Production Capability Secured
New Pyeongtaek DRAM Line to Operate Within the Year... Responding to Demand

[Asia Economy Reporter Dongwoo Lee] Samsung Electronics has established a mass production system by applying the EUV process to DRAM for the first time in the industry.

On the 25th, Samsung Electronics announced that it has completed evaluations from global customers by supplying more than one million units of the 1st generation (1x) 10-nanometer class (1 nanometer: one billionth of a meter) DDR4 DRAM modules produced using the EUV process.

Samsung Electronics evaluated that it is ready to break through the limits of semiconductor fine processes by fully applying the 'EUV process' from the next-generation DRAM products, the first in the memory industry.

By applying EUV lithography technology, the 'multi-patterning' process, which involves repeatedly engraving circuits, can be reduced. This has the advantage of improving patterning accuracy, enhancing performance and yield, and shortening product development time.

Samsung Electronics is currently developing the '4th generation 10-nanometer class (1a) DRAM mass production technology' in the early 14-nanometer range using the EUV process. It announced plans to improve the quality and yield of next-generation products beyond those of existing process products.

The 4th generation 10-nanometer class (1a) DRAM made using EUV can double productivity per 12-inch wafer compared to the 1st generation 10-nanometer class (1x) DRAM, further strengthening business competitiveness.

Samsung Electronics plans to mass-produce the 4th generation 10-nanometer class (1a) DRAM (DDR5, LPDDR5) with enhanced performance and capacity next year, and to advance the development of 5th and 6th generation DRAMs to strengthen technological leadership in the premium memory market.

Starting next year, in line with the full-scale expansion of the DDR5 and LPDDR5 DRAM markets, Samsung Electronics will strengthen technical cooperation with global IT customers and promote various standardization activities among companies to continuously increase the adoption rate of new products in next-generation systems.

Additionally, with the operation of the new Pyeongtaek line in the second half of this year, Samsung Electronics plans to establish a stable mass production system capable of responding to the increasing demand for next-generation premium DRAM.

Lee Jung-bae, Vice President of the DRAM Development Office at Samsung Electronics Memory Business Division, said, "By applying the EUV process to DRAM mass production for the first time in the industry, we can provide global customers with more differentiated solutions ahead of others," adding, "Next year, we will contribute to the continuous growth of the global IT market by advancing next-generation products with innovative memory technology."