Equipment for Removing By-products Generated in Production Process
Refining Harmful Substances in Semiconductor Process
"Effective in Reducing Direct and Indirect Greenhouse Gas Emissions"
SK Hynix announced on the 9th that it has succeeded in developing a new technology that can increase the greenhouse gas treatment efficiency of 'scrubbers' used in the etching process at its domestic facilities to 99%.
A scrubber is equipment that removes by-products generated during the production process, purifying and safely treating harmful substances in semiconductor processes where various chemicals are used.
The figure of '99% treatment efficiency' means that the amount of greenhouse gas emissions detected was below the minimum measurable level of the measuring instrument. In other words, emissions are virtually nonexistent.
The high-efficiency and low-power scrubber introduction subcommittee among the 12 subcommittees of the SK Hynix Carbon Management Committee (CMC) achieved this result. The improvement was made by injecting water into existing scrubbers, introducing a variable output system, and developing a new bay-type scrubber.
The bay-type scrubber reduces the number of devices required for greenhouse gas treatment, thereby lowering power consumption and management and operation costs. It is scheduled to be introduced next year in line with the opening of the new fab M15X. Both the improved existing scrubbers and the new scrubbers to be introduced are equipment that decomposes perfluorocompounds, which have a high global warming potential.
Lee Seong-su, TL of the scrubber introduction subcommittee of the SK Hynix CMC, said, "The value of this achievement is very significant in that perfluorocompounds, whose impact on global warming changes even with a 1% difference in efficiency, can be removed with high efficiency of about 99%. We contributed to the 'Net Zero 2050' goal in an effective way by reducing direct and indirect greenhouse gas emissions."
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