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SK Group Starts Mass Production of Hydrogen Fluoride Gas

[Asia Economy Reporter Park So-yeon] SK Group's efforts to localize materials are gaining momentum.


On the 17th, SK Group announced that SK Materials, its semiconductor materials production affiliate, has started mass production of ultra-high purity (99.999% purity) hydrogen fluoride gas, a representative item subject to Japan's export regulations.


Ultra-high purity hydrogen fluoride gas is a cleaning gas used in semiconductor manufacturing. Demand has surged due to the miniaturization of semiconductor processes, but reliance on overseas sources had reached 100%.


After successfully developing a prototype of ultra-high purity hydrogen fluoride gas at the end of last year, SK Materials has been working on localization by constructing a 15-ton scale production facility at its Yeongju plant in Gyeongbuk.


SK aims to raise the localization rate to 70% by 2023, using this mass production as a turning point. It is expected to relieve semiconductor manufacturers who have been experiencing inventory shortages. SK Group affiliates plan to share the technology and know-how needed by small and medium-sized partner companies during the materials localization process.


Along with hydrogen fluoride, SK Group is also intensifying localization efforts in the photoresist (photosensitive material) sector, which has a high dependence on overseas sources. SK Materials recently began developing hard masks and fluorinated argon photoresists.


When photoresist is applied to a semiconductor wafer and exposed to light using an exposure device, its chemical properties change in response to the light exposure, engraving circuit patterns. A hard mask is an auxiliary material for photoresist that protects the pattern from collapsing, and fluorinated argon photoresist is a type of photoresist. Both products are representative high-value-added materials used in forming ultra-fine patterns.


In particular, fluorinated argon photoresist has a 90% dependence on overseas sources, so once mass production begins, stable material supply to domestic semiconductor manufacturers will be possible. SK Materials plans to produce 50,000 gallons of photoresist annually starting in 2022, after completing its production facility in 2021.


SK Group is proceeding with materials localization in stages. Previously, SK Siltron took the lead in semiconductor materials localization through mergers and acquisitions (M&A). Last year, SK Siltron acquired the silicon carbide wafer business for next-generation power semiconductors, an essential material for electric vehicles, from the US company DuPont. The silicon carbide wafer business is dominated globally by a few companies in the US and Europe. SK Group's acquisition of DuPont's business division is regarded as a milestone that elevated the status of the domestic materials industry.


An SK Group official said, "We will promote localization and secure high value-added technology for core materials through various methodologies such as research and development, mergers and acquisitions, and technology licensing," adding, "In this process, we will strengthen win-win cooperation with small and medium-sized enterprises to enhance the competitiveness of the domestic semiconductor industry and contribute to job creation."


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